考虑周全专利名称：Sheet resistance measurement
发明人：Nulman, Jaim
申请号：EP95115314.7
申请日：19950928
小学古诗词必背75首
狠人杀公开号：EP0706209A2
公开日：
19960410我的明天
这也是一种荣誉
专利内容由知识产权出版社提供
专利附图：
摘要：The prent invention provides apparatus and methods for measuring the sheet resistance of an electrically conductive film on a miconductor substrate (24) while
送长辈什么鲜花好maintaining the substrate within the vacuum environment of the miconductor process apparatus. In one aspect of the invention, the conductive film is deposited on the
substrate (24) within a vacuum chamber (26), and the resistance probe (36) is located within the same chamber. The probe (36) retracts out of the way during deposition of the film, and then moves to the substrate (24), to measure the resistance of the film after deposition is paud or completed. In a cond aspect of the invention, the probe (36) is located in a chamber other than the chamber which deposits the conductive film. The chamber housing the probe (36) can be the "transfer chamber" (12) which hous the substrate transfer robot (22) ud to carry substrates (24) from one process chamber to another, or it can be a cooling chamber (26) which cools the substrate (24) after the film is deposited so that the sheet resistance measurement can be performed at a desired lower temperature. If the probe (36) is located in the transfer chamber (12), the probe (36) can measure the substrate (24) while it is in the transfer chamber (12) in the cour of being transferred from one process chamber to another.
申请人：APPLIED MATERIALS INC.
地址：PO Box 58039 Santa Clara California 95052 US
国籍：US
代理机构：Kahler, Kurt, Dipl.-Ing.
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